TY - GEN ET - 1 PB - IEEE PY - 2019 SN - 9781538681053 T2 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) AU - Kainz A AU - Steiner H AU - Hortschitz W AU - Schalko J AU - Jachimowicz A AU - Keplinger F DO - 10.1109/TRANSDUCERS.2019.8808410 LA - en N1 - FEMU ID: 39411; EMF-Portal URL: https://www.emf-portal.org/en/article/39411 SP - 2114-2117 TI - Improved Reference-Free Vibration-Suppressed Optical MEMS Electric Field Strength Sensor ER -